发明名称 Closed loop mover assembly with measurement system
摘要 A mover assembly ( 16 ) that moves or positions an object ( 12 ) includes a mover output ( 226 ), an actuator ( 230 ), and a measurement system ( 20 ). The mover output ( 226 ) is connected o the object ( 12 ), and the actuator ( 230 ) causes the mover output ( 226 ) to rotate about a first axis and move along the first axis. In this embodiment, the measurement system ( 20 ) directly measures the movement of the mover output ( 226 ) and provides feedback regarding the position of the mover output ( 226 ).
申请公布号 US2005200239(A1) 申请公布日期 2005.09.15
申请号 US20050126040 申请日期 2005.05.10
申请人 ZIEGLER ANDREW;ARNONE DAVID F.;HARRIMAN GREEN EVAN D. 发明人 ZIEGLER ANDREW;ARNONE DAVID F.;HARRIMAN GREEN EVAN D.
分类号 H01L41/09;(IPC1-7):H01L41/08 主分类号 H01L41/09
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