发明名称 |
Closed loop mover assembly with measurement system |
摘要 |
A mover assembly ( 16 ) that moves or positions an object ( 12 ) includes a mover output ( 226 ), an actuator ( 230 ), and a measurement system ( 20 ). The mover output ( 226 ) is connected o the object ( 12 ), and the actuator ( 230 ) causes the mover output ( 226 ) to rotate about a first axis and move along the first axis. In this embodiment, the measurement system ( 20 ) directly measures the movement of the mover output ( 226 ) and provides feedback regarding the position of the mover output ( 226 ).
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申请公布号 |
US2005200239(A1) |
申请公布日期 |
2005.09.15 |
申请号 |
US20050126040 |
申请日期 |
2005.05.10 |
申请人 |
ZIEGLER ANDREW;ARNONE DAVID F.;HARRIMAN GREEN EVAN D. |
发明人 |
ZIEGLER ANDREW;ARNONE DAVID F.;HARRIMAN GREEN EVAN D. |
分类号 |
H01L41/09;(IPC1-7):H01L41/08 |
主分类号 |
H01L41/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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