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发明名称
Operating method of vacuum processing system
摘要
申请公布号
KR100493644(B1)
申请公布日期
2005.09.15
申请号
KR19970046458
申请日期
1997.09.10
申请人
发明人
分类号
H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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