| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a flow sensor with high sensitivity, rapid response speed, and excellent reliability. <P>SOLUTION: A B-doped diamond layer 2 is formed on a first undoped diamond layer 1. Further, low-resistance B-doped diamond layers 3a and 3b having lower resistance than the diamond layer 2 has are formed on electrode parts 2a and 2b of the diamond layer 2 while signal tapping electrodes are formed out of metal, respectively, on the diamond layers 3a and 3b. Meanwhile, a second undoped diamond layer 4 is formed so as to cover a wiring part 2c of the diamond layer 2 on the diamond layer 1 in a middle part of the flow sensor 10 where the diamond layers 3a and 3b are not formed, thus forming the flow sensor. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
