THERMAL TRANSFER APPARATUS USING LASER BEAM, THERMAL TRANSFER METHOD USING LASER BEAM, AND THERMAL TRANSFER SHEET USED FOR THESE

摘要

PROBLEM TO BE SOLVED: To provide a thermal transfer apparatus using laser beams which can form adjoining patterns of different shapes at the time of the same scanning and can thermally transfer a pattern which has a boundary part of a good shape and a good position precision, and to provide a thermal transfer method employing laser beams.

SOLUTION: The thermal transfer apparatus employing the laser beams is equipped with an optical system for guiding a plurality of the laser beams oscillated from a laser oscillating means, and a two-axis stage means which carries a substrate with thermal transfer sheets including a black matrix transfer layer overlapped thereon and which can scan the substrate in mutually orthogonal first axial direction and second axial direction within a plane including a surface of the substrate. The black matrix layer is thermally transferred onto the substrate by irradiating the substrate with a plurality of the laser beams via the optical system at the time of scanning the two-axis stage means in the first axial direction or the second axial direction.

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