Lithographic positioning device and device manufacturing method

摘要

A positioning device for positioning an object inside a lithographic apparatus is described. The positioning device comprises a first drive unit and a second drive unit for positioning the object. The first drive unit has a first part connected to the object and a second part connected to a first part of the second drive unit. The positioning device further comprises a permanent magnet system constructed and arranged to provide at least part of the force for accelerating or decelerating the object.