| 摘要 |
PROBLEM TO BE SOLVED: To obtain desired cleaning performance by controlling an input amount of chemical so that the chemical concentration becomes a target value in the chemical replacement time of a treatment bath in the cleaning device of a single-bath method. SOLUTION: In a chemical supply piping path 67, a valve 82 is opened and a current value of concentration inside the treatment tank 20 by a concentration meter 81 is output to a chemical control unit 76; and in the chemical control unit 76, the chemical supply flow rate is calculated, to cancel the deviation amount between the current concentration value and an ideal concentration value in each input time of the chemical; and a pressure value according to the flow rate value is supplied to a constant pressure valve 71 as the set the air pressure of the chemical control unit 76. COPYRIGHT: (C)2005,JPO&NCIPI
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