SUBSTRATE PROCESSING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a substrate processing apparatus which has discharge electrodes inside a processing container and in which a discharge state can easily be confirmed. SOLUTION: A heat insulating member 208 is installed in such a way that at least a part of the processing container 203 forming a substrate storing space and a pair of electrodes 269 and 270 is covered. A window 251 for confirming the discharge state in a pair of the electrodes 269 and 270 is arranged in the processing container 203. COPYRIGHT: (C)2005,JPO&NCIPI