| 摘要 |
Image producing ellipsometric measuring process, in which a plurality of individual images, which respectively represent at least one part of an object, are sequentially recorded by means of an image producing detector with varying ellipsometrically relevant recording parameters ( 102, 108 ), are stored at least temporarily in a digital memory, and are at least sectionally combined with each other by computation according to pre-set rules for production of an output image or value ( 126 ), thereby characterized, that in a reference image a region of interest (ROI) is defined on the basis of image information parameters and its position and/or shape in a first individual image is determined ( 104 ), in a second individual image the position and/or shape of the ROI is determined ( 112 ) on the basis of the same image information parameters, the second individual image is corrected ( 122 ) by translation, rotation, compression and/or stretching at least sectionally in the manner, that the position and/or shape of the ROI in the second individual image corresponds with the position and/or shape of the ROI in the first individual image, and corresponding image points or regions of the position and/or shape corrected individual images are combined with each other by computation for production of the output image or value ( 126 ).
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