发明名称 Surface acoustic wave device and process for fabricating the same
摘要 A surface acoustic wave device has a piezoelectric substrate 1, and a comb transducer 2 formed on a surface of the piezoelectric substrate 1. Grooves 5 for eliminating an unnecessary wave are formed in a back surface of the surface acoustic wave device in such a manner that the interval of the adjoining grooves 5 is decreased as the groove 5 extends from one end 7 of the piezoelectric substrate 1 to the other end 8 thereof. With this arrangement, angles defined by the extending directions of the respective grooves 5 and the propagating direction of the surface acoustic wave can be differentiated from each other, and the reflecting conditions of the unnecessary wave to the respective grooves 5 can be varied from each other. This arrangement enables to improve characteristics of the surface acoustic wave device.
申请公布号 US2005200434(A1) 申请公布日期 2005.09.15
申请号 US20050076134 申请日期 2005.03.10
申请人 TAKANO ATSUSHI 发明人 TAKANO ATSUSHI
分类号 H03H9/25;H03H3/08;H03H9/02;(IPC1-7):H03H9/64 主分类号 H03H9/25
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