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发明名称
Apparat zum Herstellen von dünnen Schichten, zur Ausfüllung von feinporigen Substraten
摘要
申请公布号
DE69333600(T2)
申请公布日期
2005.09.15
申请号
DE19936033600T
申请日期
1993.10.27
申请人
ULVAC, INC.
发明人
OBINATA, HISAHARU;KIYOTA, TETSUJI;TOYODA, SATORU;KADOKURA, YOSHIYUKI
分类号
C23C14/34;C23C14/04;C23C14/35;H01J37/34;H01L21/203;H01L21/31;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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