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发明名称
Projektionsbelichtungsvorrichtung und Verfahren
摘要
申请公布号
DE69728948(T2)
申请公布日期
2005.09.15
申请号
DE19976028948T
申请日期
1997.11.14
申请人
NIKON CORP., TOKIO/TOKYO
发明人
MAGOME, NOBUTAKA
分类号
G03F7/20;G03F9/00;(IPC1-7):G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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