| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining method, wherein at least two areas on the surface of a workpiece, which areas are mutually overlapped, are irradiated with a laser beam to perform machining without deterioration of machining quality. <P>SOLUTION: A first and second areas, which have mutually overlapped portions, are demarcated on the surface of the workpiece. A part of the first area that is not overlapped with the second area is irradiated with a laser beam having a first power density not less than the threshold to form a recess part, a part of the first area that is overlapped with the second area is irradiated with a laser beam having a second power density not less than the threshold and less than the first power density, and thus a recess part is formed on the 1st area. A part of the second area that is not overlapped with the first area is irradiated with a laser beam having a third power density not less than the threshold, a part of the second area that is overlapped with the first area is irradiated with a laser beam having a fourth power density not less than the threshold and less than the third power density, and thus a recess part is formed on the second area. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
