| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate-holding device by which a substrate is surely chucked and held, even if each of a plurality of diversified components of various kinds are mounted on the substrate at high densities, in holding the support position of the substrate, while supporting the substrate on a surface at a components mounting side on which a plurality of the components are mounted. <P>SOLUTION: The substrate holding device includes a substrate-holding block, having the holding member of a substrate peripheral portion, wherein the holding member includes a support face supporting the peripheral portion, through contact with the peripheral portion in the surface at the components mounting side, and an adsorbing hole formed on the support face; a substrate-holding member which is fixed to the substrate-holding block and supports a non-mounting region, by coming into contact with the non-mounting region of each of the component, in the vicinity of nearly the center of the surface at the component-mounting side; and a components adsorbing member, which is fixed to the substrate holding block near the substrate supporting member and adsorbs surfaces of the components mounted on the surface at the component-mounting side. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
