| 摘要 |
PROBLEM TO BE SOLVED: To provide a chemical treatment apparatus and its method capable of replacement or reproduction processing of filtration members, such as filters, without stopping chemical treatment. SOLUTION: The chemical treatment apparatus 100 consists of a chemical tank 1, a chemical treatment tub 2, a chemical circulation line La, and a pump P1 and a first filtration member 3a installed at the line La. A second filtration member 3b is installed, in parallel with the first filtration member 3a at the line La. In this case, the apparatus 100 additionally has a cleaning liquid circulation line Lb, where the first and second filtration members 3a and 3b are connected in parallel. COPYRIGHT: (C)2005,JPO&NCIPI
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