| 摘要 |
PROBLEM TO BE SOLVED: To prevent the dispersion of the landing positions of liquid droplets delivered from many nozzles to thereby enable a highly precise edge part and a uniform film thickness to be formed. SOLUTION: A coating image is divided into edge images and an internal image; then, each of the edge images is finely coated continuously with minute liquid droplets by one nozzle, thereby being recorded; and finally, the internal image is recorded by a normal method. Thus, the edge image is prevented from spreading by wetness and can be coated with a high positional accuracy. The film thickness of the internal image is made uniform by a levelling effect, and since the internal image follows the previously coated edge image at the edge part, a high positional accuracy is maintained. COPYRIGHT: (C)2005,JPO&NCIPI
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