| 摘要 |
PROBLEM TO BE SOLVED: To provide a target material with a pan shape made of a material hard to be worked, and to provide its production method. SOLUTION: The target material is made of a metal deposited by thermal spraying into a pan shape. In the method for producing a target material, raw material powder is deposited on a die with a pan shape by thermal spraying to obtain a target material with a pan shape. Further, in the method for producing a target material, plasma is generated inside a chamber, and then, raw material powder is fed inside the plasma, thus the raw material powder is melted and is deposited on a die with a pan shape mounted inside the chamber to obtain a target material with a pan shape. COPYRIGHT: (C)2005,JPO&NCIPI
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