发明名称 METHOD FOR MANUFACTURING THIN FILM FOR SEPARATING HYDROGEN, AND PALLADIUM PLATING BATH
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a thin film for separating hydrogen, and a palladium plating bath in which a hydrogen separating film to be used for, for example, a modified fuel cell is suitably manufactured, the hydrogen separating film is reduced in film thickness, hydrogen can be separated at high purity, a fuel reformer is reduced in size and weight, the modification reaction is performed with high efficiency and high economical efficiency a palladium thin film can be suitably manufactured by the plating method in the plating bath, the use of plating liquid is reduced, a uniform palladium film can be deposited, and the plating productivity can be improved. <P>SOLUTION: In the method for manufacturing the thin film for separating hydrogen, metal ions in plating liquid 10 stored in a reaction bath 1 are deposited on a work 18 to be plated. Plating liquid 10, supercritical state or substance formed therein, and surfactant 11 are stored in the reaction bath 1. After the super-critical state and the emulsion state are formed in the reaction bath 1, the metal ions are diffused to be deposited on the work 18 to be plated. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005248192(A) 申请公布日期 2005.09.15
申请号 JP20040055910 申请日期 2004.03.01
申请人 UEMIYA NARIYUKI;YOSHIDA HIDEO;ASAHI KASEI ENGINEERING KK 发明人 UEMIYA NARIYUKI;YOSHIDA HIDEO;SONE MASATO;SATO NOBUYOSHI;MIYATA SEIZO
分类号 C23C18/44;C23C18/31;H01M8/06 主分类号 C23C18/44
代理机构 代理人
主权项
地址