摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a thin film for separating hydrogen, and a palladium plating bath in which a hydrogen separating film to be used for, for example, a modified fuel cell is suitably manufactured, the hydrogen separating film is reduced in film thickness, hydrogen can be separated at high purity, a fuel reformer is reduced in size and weight, the modification reaction is performed with high efficiency and high economical efficiency a palladium thin film can be suitably manufactured by the plating method in the plating bath, the use of plating liquid is reduced, a uniform palladium film can be deposited, and the plating productivity can be improved. <P>SOLUTION: In the method for manufacturing the thin film for separating hydrogen, metal ions in plating liquid 10 stored in a reaction bath 1 are deposited on a work 18 to be plated. Plating liquid 10, supercritical state or substance formed therein, and surfactant 11 are stored in the reaction bath 1. After the super-critical state and the emulsion state are formed in the reaction bath 1, the metal ions are diffused to be deposited on the work 18 to be plated. <P>COPYRIGHT: (C)2005,JPO&NCIPI |