| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas supply integrated unit which can surely perform purging when installing additional lines. SOLUTION: The gas supply integrated unit having a plurality of gas units comprises a process gas common passage-end manual valve 22, purge gas common passage-end manual valve 23, additionally installed gas unit comprising a process gas common passage-end manual valve 24, a purse gas common passage-end manual valve 25, and a second manual valve 13B, first communication passage 52 for allowing the communication between the purge gas common passage-end manual valve 25 and the process gas common passage-end manual valve 24, second communication passage 59 for allowing the communication between the process gas common passage-end manual valve 24 and the process gas common passage-end manual valve 22, and third communication passage 373A for allowing the communication between the process gas common passage-end manual valve 22 and the second manual valve 13B. COPYRIGHT: (C)2005,JPO&NCIPI
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