| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical modulator capable of forming an optical gap simply and accurately without underetching a sacrificial layer. SOLUTION: The optical modulator is equipped with a first substrate 100 in which a first recess 103 is provided whose bottom becomes a movable part 109 and in which a movable reflection film 105 is formed in the movable part 109, and a second substrate 200 in which a second recess 203 having a diameter smaller than that of the first recess 103 is provided at a position facing the first recess 103 and in which a fixed reflection film 207 is formed in the bottom of the second recess 203. In the optical modulator 1, the depth of the first recess 103 determines the movable range of the movable reflection film 105, and then, by the interval between the movable reflection film 105 and the fixed reflection film 207, an optical gap X is decided; thus the need for underetching the sacrificial layer is eliminated. COPYRIGHT: (C)2005,JPO&NCIPI
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