| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure device capable of well performing an exposure process and a measurement process through liquid. <P>SOLUTION: An exposure device EX exposes a substrate P by irradiating the substrate through liquid LQ with exposure light EL. The exposure device EX has a substrate holder PH for holding the substrate P, a substrate stage PST movable with the substrate P held on the substrate holder PH, and a temperature regulation system 60 for regulating the temperature of the substrate holder PH. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
