| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical deflector which prevents stress generated between a substrate supporting a mirror and a base which fixes the substrate from being transferred to the mirror. SOLUTION: The present invention is characterized by that the optical deflector has the mirror, a torsion bar elastically supporting the mirror, the substrate supporting the mirror by being connected with the torsion bar and the base on which the substrate is mounted, the mirror is fixed in the optical deflector rocking on the base, and the substrate and the base are fixed by that a permanent magnet and a magnetic thin film on the side of the substrate are pulled by each other. COPYRIGHT: (C)2005,JPO&NCIPI
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