LIGHTING UNIT FOR IMAGING DEVICE INSPECTION, IMAGING DEVICE INSPECTING DEVICE, METHOD FOR INSPECTING IMAGING DEVICE, AND METHOD FOR MANUFACTURING IMAGING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a lighting unit for imaging device inspection such that the pupil position and pupil size (F value) of illumination light can be varied while a lighting visual field is secured. SOLUTION: Illumination light emitted from a secondary light source 8 forms the image of the secondary light source 8 on a P' surface through a relay optical system comprising a lens group 5, a lens group 4, and a lens group 2. The relay lens system comprises a power variation part consisting of the lens group 5 and lens group 4 and an imaging part consisting of the lens group 2. The power variation part can vary projection magnification (corresponding to the lighting F value) of the light source image by varying the distance e3 between the lens group 5 and lens group 4. At this time, the image of the secondary light source 8 is formed at an inspected-body side focus position P' of the lens group 2. The interval e1between the light source image P' and lens group 1 is set with a specified relational expression and thus the point (the exit pupil position of a lighting optical system) where the center line of luminous flux irradiating an inspection surface crosses the optical axis is determined and can be made coincident with the incidence pupil position of the imaging device. COPYRIGHT: (C)2005,JPO&NCIPI