| 摘要 |
PROBLEM TO BE SOLVED: To provide a nanoparticle manufacturing technique compatible with mass production, that is, an apparatus and a method for manufacturing a nanoparticle, which nanoparticle shows recovery rate of 30% class or more and a high dispersibility, in the manufacturing field of the nanoparticle such as of oxides or of metals having a particle diameter of 100 nm class or less. SOLUTION: The method and the apparatus for manufacturing the nanoparticles which collect nanoparticles after evaporating raw materials of nanoparticles, and depositing a vaporized material make surround a raw material evaporation apparatus with a piling apparatus, and at the same time, by controlling the temperature of the piling apparatus uniformly and so as to be room temperature, aim at the improvement of the recovery rate of nanoparticles using thermophoresis. Further, the installation of an antenna electrode causes the ionization of a reactive gas such as hydrogen and oxygen, produces active species, and terminates bonds of impurities in the nanoparticle forming process of the vaporized material to improve the dispersibility of the nanoparticles. COPYRIGHT: (C)2005,JPO&NCIPI
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