IC TILING PATTERN METHOD, IC SO FORMED AND ANALYSIS METHOD,申请号EP20020799293-传众专利搜索

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发明名称	IC TILING PATTERN METHOD, IC SO FORMED AND ANALYSIS METHOD
摘要
申请公布号	EP1573808(A1)	申请公布日期	2005.09.14
申请号	EP20020799293	申请日期	2002.12.20
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	ALLEN, ROBERT, J.;COHN, JOHN, M.;HABITZ, PETER, A.;LEIPOLD, WILLIAM;WEMPLE, IVAN;ZUCHOWSKI, PAUL, S.
分类号	H01L23/48;G06F9/45;G06F13/00;G06F17/50;H01L21/321;H01L23/52;H01L23/528;H01L23/535;H01L27/02;(IPC1-7):H01L23/48	主分类号	H01L23/48
代理机构		代理人
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