Photoacoustic gas sensor and manufacturing process thereof

摘要

A photoacoustic gas sensor has a measuring cell (1) and a reference cell (2), a light source (4) emitter and a microphone that measures the difference in pressure (1, 2). The microphone and light source are mounted on a common baseplate (8, 10) and combined with the measuring and reference cells in a common module. The noise cancelling microphone is of the type used in cellphones. The inner chamber between the measuring cell (1) and reference cell (2) is sealed by a bonding agent against the microphone base plate. An independent claim is included for the production of a photoacoustic gas sensor.