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发明名称
METHODS FOR POLISHING AND/OR CLEANING COPPER INTERCONNECTS AND/OR FILM AND COMPOSITIONS THEREFOR
摘要
申请公布号
EP1572821(A1)
申请公布日期
2005.09.14
申请号
EP20030777947
申请日期
2003.10.28
申请人
3M INNOVATIVE PROPERTIES COMPANY
发明人
KESARI, SUSRUT;LAMANNA, WILLIAM, M.;PARENT, MICHAEL, J.;ZAZZERA, LAWRENCE, A.
分类号
C09G1/02;C11D3/34;C11D11/00;C23F3/06;C23G1/10;H01L21/02;H01L21/288;H01L21/321;H01L21/3213;H01L21/768;(IPC1-7):C09G1/02;C23F3/00;C11D1/00
主分类号
C09G1/02
代理机构
代理人
主权项
地址
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