| 发明名称 |
INSPECTION METHOD AND INSPECTION EQUIPMENT |
| 摘要 |
In an inspection method according to the invention, a plurality of drivers 21 incorporated in a tester 20 apply a fritting voltage to respective electrodes P via first probe pins 11A included in pairs of first and second probe pins 11A and 11B and connected to the respective drivers. <IMAGE>
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| 申请公布号 |
EP1574866(A1) |
申请公布日期 |
2005.09.14 |
| 申请号 |
EP20030777392 |
申请日期 |
2003.12.09 |
| 申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
SHINOZAKI, DAI,;KOMATSU, SHIGEKAZU, |
| 分类号 |
G01R1/06;G01R31/28;G01R31/3161;G01R31/319;H01L21/66;(IPC1-7):G01R31/28 |
主分类号 |
G01R1/06 |
| 代理机构 |
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| 主权项 |
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