发明名称 |
Positioning device for microscopic motion |
摘要 |
An apparatus including a base configured to slidably engage a driven element, a piezoelectric element interposing the base and the driven element and attached to the base proximate a first piezoelectric element end, and a friction element attached proximate a second piezoelectric element end and configured to selectively engage the driven element. <IMAGE>
|
申请公布号 |
EP1574282(A2) |
申请公布日期 |
2005.09.14 |
申请号 |
EP20050250832 |
申请日期 |
2005.02.14 |
申请人 |
ZYVEX CORPORATION |
发明人 |
BAUER, CHRISTOF;BRAY, KEN |
分类号 |
G12B5/00;B23Q1/34;B81B5/00;G01Q10/00;H01L41/08;(IPC1-7):B23Q1/34 |
主分类号 |
G12B5/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|