BUBBLER FOR SUBSTRATE PROCESSING,申请号EP20030748946-传众专利搜索

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发明名称	BUBBLER FOR SUBSTRATE PROCESSING
摘要
申请公布号	EP1573780(A2)	申请公布日期	2005.09.14
申请号	EP20030748946	申请日期	2003.07.18
申请人	ASM AMERICA, INC.	发明人	STAMP, MICHAEL, R.;AMRHEIM, FREDERICK, J.;DALE, ARNOLD, J.;POTTEBAUM, JOSEPH, C.;EBERT, BRIAN, J.
分类号	C23C16/24;C23C16/40;C23C16/448;H01L21/02;H01L21/205;(IPC1-7):H01L21/00	主分类号	C23C16/24
代理机构		代理人
主权项
地址

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