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发明名称
摘要
申请公布号	JP3694282(B2)	申请公布日期	2005.09.14
申请号	JP20020212649	申请日期	2002.07.22
申请人		发明人
分类号	C30B29/06;C30B1/00;C30B31/20;C30B33/04;H01L21/20;H01L21/205;(IPC1-7):C30B29/06	主分类号	C30B29/06
代理机构		代理人
主权项
地址

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