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发明名称
ACCESS TO ONE OR MORE LEVELS OF MATERIAL STORAGE SHELVES BY AN OVERHEAD HOIST TRANSPORT VEHICLE FROM A SINGLE TRACK POSITION
摘要
申请公布号
EP1573778(A2)
申请公布日期
2005.09.14
申请号
EP20030776281
申请日期
2003.10.09
申请人
BROOKS AUTOMATION, INC.
发明人
TAWYER, JEFFREY, T.;DOHERTY, BRIAN, J.
分类号
H01L21/677;(IPC1-7):B65G1/06
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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