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发明名称
摘要
申请公布号
JP3696119(B2)
申请公布日期
2005.09.14
申请号
JP20010129243
申请日期
2001.04.26
申请人
发明人
分类号
H01L21/8247;H01L21/28;H01L21/318;H01L21/8246;H01L27/105;H01L27/115;H01L29/51;H01L29/78;H01L29/788;H01L29/792;(IPC1-7):H01L29/78;H01L21/824
主分类号
H01L21/8247
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代理人
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