Ellipsometric method with correction via image registration.

摘要

The method involves acquiring successive images each representing at least part of an object under different ellipsometrically relevant conditions, storing in a digital memory unit and processing according to defined rules to produce a resulting image or value. It involves defining a region of interest or ROI in a reference image using imago information parameters and determining its position and/or shape in first and second single images, correcting the second image so that the positions and/or shapes of the ROIs coincide in the two images and processing corresponding image points and/or regions to produce the resulting image.