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发明名称
LOW THERMAL EXPANSION CERAMIC AND MEMBER FOR EXPOSURE SYSTEM
摘要
申请公布号
EP1323684(A4)
申请公布日期
2005.09.14
申请号
EP20010967756
申请日期
2001.09.20
申请人
SUMITOMO METAL INDUSTRIES, LTD.
发明人
YOSHITOMI, YASUKI;ARAHORI, TADAHISA
分类号
C03C10/08;C03C10/12;C04B33/14;C04B35/18;C04B35/19;C04B35/195;C04B35/645;(IPC1-7):C04B35/16;H01L21/027;G03F7/20
主分类号
C03C10/08
代理机构
代理人
主权项
地址
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