发明名称 Apparatus and method for detecting photon emissions from transistors
摘要 A system, apparatus, and method for analyzing photon emission data to discriminate between photons emitted by transistors and photons emitted by background sources. The analysis involves processing of integrated circuit computer aided design data to identify transistors within the CAD data. The analysis may further involve the use of Boolean operators to process the CAD data to particularly identify, such as through a channel, the location of the NMOS and PMOS gates, the location of the drain and source, or some combination of the location of the gate and drain or source to particularly identify the pinch-off region.
申请公布号 US6943572(B2) 申请公布日期 2005.09.13
申请号 US20030728522 申请日期 2003.12.05
申请人 CREDENCE SYSTEMS CORPORATION 发明人 DESPLATS ROMAIN;PERDU PHILIPPE;SHAH KETAN J.;LUNDQUIST THEODORE R.
分类号 G01R31/26;G01R31/28;G01R31/302;G01R31/311;(IPC1-7):G01R31/302 主分类号 G01R31/26
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