| 摘要 |
A pressure sensor for measuring a pressure includes a pressure chamber; and a deformation body, which can be exposed to a medium under pressure, and which, additionally, at least partially bounds the pressure chamber and seals such pressure-tightly from the medium; wherein the walls of the sensor chamber have a hydrophobic coating, which was applied by gas and/or vapor phase deposition. The hydrophobic coating preferably includes a silane. Especially suited are silanes having one or more hydrophobic groups R and one or more anchoring groups X. Especially preferred are: R-Si-X<SUB>3</SUB>, R<SUB>1</SUB>R<SUB>2</SUB>-Si-X<SUB>2</SUB>, R<SUB>1</SUB>R<SUB>2</SUB>R<SUB>3</SUB>-Si-X. The hydrophobic group R is preferably an alkyl, perfluoroalkyl, phenyl or perflurorophenyl group. The anchoring group X is preferably an -OH (silanol), -X (halide, e.g. -Cl), -OR (ester, e.g. -OCH3), -NH2 (amine), or -SH (Mercaptosilane). Additionally, aliphatic or cyclic silazanes -Si-NH-Si-, e.g. hexamethyldisilazane, can be used. Likewise suitable are compounds of the type R<SUB>y</SUB>-Me-X<SUB>z</SUB>, with Me=e.g. Zr, Ti.
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