Piezoelectric actuator, liquid jetting head and liquid jetting device using the same

摘要

It is an object of the present invention to provide a piezoelectric actuator which uses strontium ruthenate as the material of the bottom electrode, and which uses PMN-PT as the material of the piezoelectric layer. This piezoelectric actuator comprises a base layer ( 31, 20 ) of SiO₂ or Si ((100) orientation or (110) orientation), a buffer layer ( 41 ) constituted by strontium ruthenate (SRO), and a piezoelectric layer ( 44 ) constituted by a relaxor dielectric (PMN-PT) with a rhombohedral or quasi-cubic crystal structure oriented in the (001) direction at room temperature.