发明名称 COMPOSITE PATTERNING WITH TRENCHES
摘要 Systems and techniques for printing substrates. In one implementation, a method includes patterning a substrate with a substantially arbitrary arrangement of features by introducing irregularity into an array of repeating lines and spaces between the lines.
申请公布号 WO2005083513(A2) 申请公布日期 2005.09.09
申请号 WO2004US33432 申请日期 2004.10.07
申请人 INTEL CORPORATION 发明人 BORODOVSKY, YAN
分类号 G03F7/00;G03F7/20;H01L21/027 主分类号 G03F7/00
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