摘要 |
An optical signal, in particular for projection microlithography, having optical elements (2), in particular mirrors and/or lenses, in a sealed sheath in which there is an inert gas or vacuum, and having a bearing (1) with a bearing gap. The bearing is a fluid bearing and the bearing gap (7) has restriction stages and is pumped differentially in two or more stages. |
申请人 |
CARL ZEISS SMT AG;SOHMEN, ERIK;KAUFMANN, PAUL;SCHWARZ, WERNER |
发明人 |
SOHMEN, ERIK;KAUFMANN, PAUL;SCHWARZ, WERNER |