发明名称 SEMICONDUCTOR DEVICE
摘要 A semiconductor device, wherein a substrate (51) is formed in a rectangular shape with four sides along dicing lines, and a jetty part (56) is formed to surround all the peripheries of an actuator element (50) and electrode pads (54) and (55) for input/output. The jetty part (56) is formed in a rectangular shape with four sides, and each side thereof is continuously extended parallel with each side of the substrate (51). Since the adhesion of a protective tape (9) can be increased by the jetty part (56), foreign matters (104) produced in dicing can be prevented from adhering to the actuator element (50) and the electrode pads (54) and (55).
申请公布号 WO2005083765(A1) 申请公布日期 2005.09.09
申请号 WO2005JP03302 申请日期 2005.02.28
申请人 TOKYO ELECTRON LIMITED;KAGAWA, KENICHI;YAKABE, MASAMI 发明人 KAGAWA, KENICHI;YAKABE, MASAMI
分类号 B81B3/00;B81C1/00;G01D5/24;G01P15/08;G01P15/125;H01L21/301;H01L29/84 主分类号 B81B3/00
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