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发明名称
Method for manufacturing trench-isolated FET devices
摘要
申请公布号
KR100498436(B1)
申请公布日期
2005.09.09
申请号
KR19980040275
申请日期
1998.09.28
申请人
发明人
分类号
H01L21/335;(IPC1-7):H01L21/335
主分类号
H01L21/335
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代理人
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