发明名称 HOUSING STRUCTURE
摘要 <p>A housing structure has a frame structure (1) on which there are arranged via connecting elements (7) several optical elements (5) which are held in mounts (6) or structural modules (6'). The optical elements (5) are detachably connected to the frame structure (1) with their mounts (6) or structural modules (6') and connecting elements (7) in such a way that in the installed state they are integrated as bearing units in the frame structure (1).</p>
申请公布号 WO2005083487(A1) 申请公布日期 2005.09.09
申请号 WO2004EP04235 申请日期 2004.04.20
申请人 CARL ZEISS SMT AG;STOMMEN, BERNARD;SOEMERS, HERMAN;VAN DEUREN, FRANZ;BROM, PAUL, P., A.,;KWAN, YIM-BUN, PATRICK;XALTER, STEFAN;DEUFEL, PETER 发明人 STOMMEN, BERNARD;SOEMERS, HERMAN;VAN DEUREN, FRANZ;BROM, PAUL, P., A.,;KWAN, YIM-BUN, PATRICK;XALTER, STEFAN;DEUFEL, PETER
分类号 G01M11/04;G02B7/00;G02B7/182;G03F7/20;(IPC1-7):G02B7/00 主分类号 G01M11/04
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