BURIED HETEROSTRUCTURE DEVICE FABRICATED BY SINGLE STEP MOCVD

摘要

The device is an optoelectronic device or transparent waveguide device that comprises a growth surface (122), a growth mask (132), an optical waveguide core mesa (140) and a cladding layer (160). The growth mask is located on the growth surface and defines an elongate growth window (134). The optical waveguide core mesa is located in the growth window and has a trapezoidal cross-sectional shape. The cladding layer covers the optical waveguide core mesa and extends over at least part of the growth mask. Such devices are fabricated by providing a wafer (110) comprising a growth surface (122), growing an optical waveguide core mesa (140) on the growth surface by micro-selective area growth at a first growth temperature and covering the optical waveguide core mesa with cladding material (160) at a second growth temperature, lower than the first growth temperature.