| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card capable of disposing a wiring pattern easily without providing a through hole, while using a silicon substrate as the support substrate. SOLUTION: This probe card is equipped with a pyramid-shaped support substrate 100 having one step on one surface, a plurality of probes 200 provided on the surface of a thick part of the support substrate 100, a plurality of bumps 110 provided on the surface of a thin part of the support substrate 100, and a plurality of wiring patterns 120 formed on one surface of the support substrate 100, for connecting electrically the probes 200 to the bumps 110 respectively. COPYRIGHT: (C)2005,JPO&NCIPI
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