| 摘要 |
PROBLEM TO BE SOLVED: To provide a porous static pressure gas bearing capable of increasing gas pressure in a clearance between a supported member and a porous part up to high pressure and suppressing self-excited vibration caused by compression property of gas, and also to provide a porous static pressure gas bearing device provided with it. SOLUTION: This porous static pressure gas bearing device 1 is provided with a back plate part 2, the porous part 5 fixed to the back plate part 2 and injecting compressed gas 4 to support the supported member 3, a plurality of porous static pressure gas bearings 8 arranged between the back plate part 2 and the porous part 5 and provided with a restriction part 7 for restricting a gas supply chamber 6 for supplying the compressed gas 4 into the porous part 5 and a communicating hole 23 as a flow passage of the compressed gas 4 to be fed into the gas supply chamber 6, respectively, and a holding base 9 for holding the supported member 3 through the plurality of porous static pressure gas bearings 8 so as to move freely in X direction. COPYRIGHT: (C)2005,JPO&NCIPI
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