| 摘要 |
PROBLEM TO BE SOLVED: To stably hold an optical element in a tilt state. SOLUTION: A laser annealing apparatus 10 comprises: a laser oscillator 12; a variable attenuator 14; a homogenizer 16; a stage device 18 supporting a substrate W; and a controller 20. A first mirror device 22 and a third mirror device 28 provided in the optical path of a laser beam are supported by being hung downward in a state that a reflection face is tilted by a predetermined angle, and thus they are held by vacuum suction force of a mirror holding device 32. The mirror holding device 32 sucks a mirror 42 with vacuum onto the butting face 44a of a tilted mirror base 44, thus the mirror 42 is tightly held on the butting face 44a having a highly accurate flatness, the flatness accuracy of the reflection face of the mirror 42 is enhanced, and the mirror 42 is also stably held in a tilted state. COPYRIGHT: (C)2005,JPO&NCIPI
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