| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface profile detector, capable to detect surface profile correctly by eliminating the effects of disturbance light and others. SOLUTION: In the each block domain E1 to E3, defined by dividing the imaging area 13A of the two-dimensional CCD 13, the peak position P of light-receiving level is detected on each scanning lines L1 to L7, L8 to L14 and L15 to L21 located in each block domain E1 to E3, and then based on the detected data of peak position of light-receiving level on each scanning line the standard class (or the standard extent on scanning direction) concentrated by the most peak position P of light-receiving level is specified. Finally, based on the data of peak position of light-receiving level of the peak position P' of light-receiving level, except for the peak position of light-receiving level separated by more than class 2 from the standard class specified by this specific operation, the surface profile detecting constitution is formed for the target object W. COPYRIGHT: (C)2005,JPO&NCIPI
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