Arrangement for determining the density of back-scattered electrons diffracted from crystal lattices has first and second measurement means with the second measurement means having an order of magnitude higher resolution

摘要

Arrangement for determining the density of back- scattered electrons within the areas of diffraction bands, which have been generated as a result of the irradiation of a crystal lattice with electrons. The arrangement has first and second measurement means and evaluation means. The first measurement means are used to determine the electron density according to a solid angle determination, while the second determines it in the Kikuchi lines. The spatial resolution of the first measurement means is an order of magnitude less than that of the second measurement means.