DISPLAY DEVICE, ITS MANUFACTURING METHOD AND TELEVISION RECEIVER

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a substrate having a film pattern such as an insulating film, a semiconductor film and a conductive film by a simple method, and to inexpensively provide a manufacturing method of a display device high in throughput and yield. SOLUTION: A first film pattern is formed on the substrate by using a photosensitive material. The first film pattern is irradiated with a first laser beam and developed. A second film pattern is formed and the surface of the second film pattern is reformed to a splash liquid surface. A conductive material is discharged to the outer edge of the splash liquid surface by a drop discharge method. A semiconductor region, a gate insulating film and a gate electrode are formed on the source electrode and the drain electrode. COPYRIGHT: (C)2005,JPO&NCIPI