HIGH BANDWITH, DYNAMICALLY RIGID METROLOGY SYSTEM FOR THE MEASUREMENT AND CONTROL OF INTELLIGENT MANUFACTURING PROCESSES.

摘要

Apparatus providing real time control of an optical steering element includes a pair of stabilized laser beam directors (52). Each SLBD (52) includes a base, beam pointing, and stabilization apparatus mechanically coupled to the base (10), three reference beam lasers (13) and a stabilized beam laser attached to the base (10). Each beam pointing and stabilization apparatus includes an optical steering element and an axis tilt detector. The optical steering element is optically coupled to the stabilized beam laser and steers the stabilized beam laser (56). The reference subsystem includes three reference detectors (58) fixedly positioned relative to a workpiece providing a locally rigid workpiece coordinate system. The three referenced detectors (58) are respectively in optical communication with the three reference beam lasers (13). A processor receives and performs coordinate transforms on the referenced detector output signals and the tool sensor detector ouput signals to track a position of the tool relative to the rigid workpiece coordinate system.